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Gas Handling

• NuPure Point of Use Gas purifiers
  For Hydrides, inert and a range of other gases. Sub ppb purity at room temperature.
  
  
• Jipelec
  Liquid precursor delivery and vaporization systems
  
  
• Qualiflow
  Mass, Liquid & Vapour Flow Controllers & Meters
  UHP Gas systems, fittings and valves: Bellows, Diaphragm & Manifolds
  See www.qualiflow.com for more details.
  
  
• Firechek
  Temperature triggered safety valve, shuts off pneumatic supply to critical devices, e.g. cylinder valves, in the event of a fire. For more information see Firechek details

Hot Wafer Processing

• Jipelec
  Rapid Thermal Processors
  See www.jipelec.com for more details.


• AET
  Furnace elements and refurbishments
  Vertical, Horizontal & research scale.
  See www.aet-technologies.com for more details.


• SEMCO
  Vertical & Horizontal furnaces
  Process Control & Automation
  See www.semcoeng.com for more details.


• Diamond Semiconductor
  Cantilever Loading Systems
  See www.diamondsemiconductor.com for more details.


• Vogelsberger Quartz Glass Products
  ISO 9001:2000 certified company,
  with 3 factories in Germany
  Using Heraeus and GE material, with all the necessary in house technology:
  • CNC-processing
  • laser cutting
  • jet cutting
  • hydrogen welding
  Vogelsberger is making horizontal and vertical process tubes up to 8" technology, as well as carriers, pedestals, injectors and other accessories for furnace equipment.
  Also second source parts for wet etch, RTP and other single wafer processing equipment.
  Quartz Glass RFQ
  

Etch & Epi Spares

• CE-MAT
  2nd source spares & repairs (Quartz & Silicon components) for:
  • Epi-reactors
  • Liners
  • Domes
  • Susceptor Support Shafts
  • Wafer Lift Shafts
  • Etchers
  • Silicon Electrodes
  • Focus Rings
  • Insert Rings
  • Shadow Rings

Materials and Analysis

• CMK
  An ISO 9001 certified EU producer of:
  • GaAs: VGF & LEC, 2" & upwards
  • 6N, 7N, MBE grade Gallium
  
  
  CMK also recycle and refine Gallium from scrap Ga & GaAs and have a proprietary process for removing Germanium.
  CMK offer World Class GDMS analysis (using VG9000) providing data on up to 54 elements.
  
  
• Mitsui
  UHP SiC dummy wafers 5"-12"

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